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Millimeter Wave Automated Tuners MT97x Series
Features 33 - 110 GHz High Matching Range Wafer Probing Applications Description The Maury MT97x series of millimeter wave automated tuners are precision electromechanical instruments capable of matching a wide range of impedances covering the millimeter waveguide frequencies from 33 to 110 GHz. These precision tuners feature an extremely wide matching range with superb repeatability. The tuners come with Maury precision flanges which ensure an accurate and repeatability interface. Automated tuners have proven to be invaluable tools in making precise and repeatable load pull and source pull power and noise measurements. These tuners are key elements in the Maury automated tuner system (ATS) used for device characterization. The tuners are designed with removable feet and mounting holes for adapting to wafer probe stations. NOTE: All models in this series are protected under U. S. PATENT NO. 5,910,754 Specifications Minimum Matching Range: 20:1 1 Maximum VSWR: 1.06 2 Maximum Insertion loss: 0.65 2 Worst Case Repeatability: > 50 dB Step Size (probes): 0.5 micron Step Size (carriage): 0.5 micron Power Handling: 20W CW, 200W peak Model Frequency Range (GHz) EIA WR No. Designation Mates With MT979A 75.0 - 110.0 10 MPF10 UG385/U MT978A 60.0 - 90.0 12 MPF12 UG385/U MT977A 50.0 - 75.0 15 MPF15 UG385/U MT976A 40.0 - 60.0 19 MPF19 UG383/U MT975A 33.0 - 50.0 22 MPF22 UG383/U 1 Equivalent VSWR. 2 Probe retracted. Product Data Sheet 4T-059 - Millimeter Wave Automated Tuners -Series MT97x.	[Click these images for larger views.] MT979A shown with cover and leveling feet removed. MT975A shown with cover and leveling feet removed.
Dimensions Figure 1. Typical dimensions for the MT977A , MT978A, MT979A models. Figure 2. Typical dimensions for the MT975A and MT975A models.
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